CARACTERIZACIÓN RAMAN Y EDX DE PELÍCULAS DELGADAS DE CNX CRECIDAS POR ABLACIÓN LÁSER

Authors

  • J. L. Gallego
  • L. M. Franco
  • H. Riascos
  • C. Vargas-Hernández
  • E. Ospina

Abstract

In the present study a-CNx amorphous carbon nitride thin films were deposited using a pyrolytic graphite target with a purity of 5N on silicon (100) substrate in a nitrogen gas atmosphere using pulsed laser deposition technique. We used a Nd:YAG laser with laser fluence of 10 J/cm2. The films were characterized by μ-Raman spectroscopy and Energy Dispersive X-ray EDX microanalysis. The Raman spectra showed the characteristic peaks of amorphous carbon D (1354 cm-1) and G (1555 cm-1), corresponding to sp2 bonding. The peak intensity ratio (ID/IG) from Raman spectra increases as substrate temperature and nitrogen gas pressure increase. The (EDX) analysis confirmed the presence of C, N elements. The plume plasma produced by laser was characterized by optical emission spectroscopy. From the emission spectra, carbon and nitrogen atomic species and CN molecule were indentified.

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Published

2009-12-21

How to Cite

Gallego, J. L., Franco, L. M., Riascos, H., Vargas-Hernández, C., & Ospina, E. (2009). CARACTERIZACIÓN RAMAN Y EDX DE PELÍCULAS DELGADAS DE CNX CRECIDAS POR ABLACIÓN LÁSER. LatinAmerican Journal of Metallurgy and Materials, 109–114. Retrieved from https://www.rlmm.org/ojs/index.php/rlmm/article/view/22

Issue

2009, 29(2)

Section

Regular Articles

License

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